8/31/2023 0 Comments Quartz tuning fork sensorOperation characteristic of piezoelectric quartz tuning fork in high magnetic fields at helium temperatures. Rychen, J., Ihn, T., Studerus, P., Herrmann, A., Ensslin, K., Hug, H.J., Schendel, P.J.A., Guntherodt, H.J., 2000. Micromachined Quartz Resonator-Based High Performance Thermal Sensors. Application of micromachined Y-cut-quartz bulk acoustic wave resonator for infrarared sensing. Analytical and finite element method design of quartz tuning fork resonator and experimental test samples manufactured using photolithography 1-significant design parameters affecting static capacitance C 0. Fabrication of an array of surface mount device 32.768 kHz quartz tuning fork-type crystals: photolithography and selective etching of an array of quartz tuning fork resonators with subsequent photoresist spray coating. PSoC-based embedded design and quartz tuning fork for low-temperature measurement system. Jayapandian, J., Swarrup, J.S., Sheela, O.K., Ravi, U., 2012. A new low-cost high-performance quartz tuning-fork temperature sensor. A Linear Quartz Crystal Temperature Sensing Element. A lateral-axis microelectromechanical tuning-fork gyro-scope with decoupled comb drive operating at atmospheric pressure. Solid-State Sensors, Actuators and Microsystems Conf., p.1496–1499. Piezoelectric Micro-Scale Tuning Fork Resonators for Sensing Application. Gil, M., Manzaneque, T., Hernando-García, J., Ababenh, A., Seidel, H., Rojas, J.L., 2011. Survey of quartz bulk resonator sensor technologies. Review of thickness-shear mode quartz resonator sensors for temperature and pressure. The Torsional Tuning Fork as a Temperature. Controlling the quality factor of a tuning-fork resonance between 9 and 300 K for scaning-probe microscopy. Quartz tuning fork for viscometers for helium liquids. Force-gradient-induced mechanical dissipation of quartz tuning fork force sensors used in atomic force microscopy. Ĭastellanos-Gomez, A., Agrait, N., Rubio-Bollinger, G., 2011. Sensors based on piezoelectric resonators. Microengineered silicon double-ended tuning fork resonators. All these research are helpful to design satisfactory performance of the sensor for temperature measurement.Beeby, S.P., Ensell, G., White, N.M., 2000. The experimental results shown that a temperature accuracy of 0.01 ☌ and a resolution of 0.005 ☌ within temperature range from 0 ☌ to 100 ☌. The whole structure is 500μm thickness, the length of tuning fork arm is 3076μm and the width of tuning fork arm is 600um, the frequency of tuning fork is about 37kHz with a sensitivity of rough 85 ppm/☌. Finite element method is used to analyze the vibratory modes and optimize the structure. Based on this principle, a resonant thermometer is designed. When an external temperature is change, there is a shift in its natural frequency. The quartz tuning fork temperature sensor consists of two prongs connected at one end of crystalline quartz plate with thin-film metal electrodes deposited on the faces, which is used to produce vibration in response to alternating voltages and detecting the resonance frequency in the meantime. The quartz tuning temperature sensor is designed vibrating in flexural mode with a new thermo-sensitive cut. In this paper, a low cost quartz tuning fork temperature sensor adopting H-shaped tuning fork resonator to address miniaturization, high resolution and high stability has been designed, developed and tested.
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